| Автор | Nguyen, Minh D |
| Автор | Vu, Hung N |
| Автор | Blank, Dave H A |
| Автор | Rijnders, Guus |
| Дата выпуска | 2011-03-01 |
| dc.description | This research presents the deposition and device fabrication of epitaxial Pb(Zr,Ti)O<sub>3</sub> (PZT) thin films for applications in microelectromechanical systems (MEMS). A piezoelectric micro-membrane is described as an example. Using the pulsed laser deposition (PLD) technique and the MEMS microfabrication process, the piezo-membranes with diameters ranging from 200 to 500 μm were obtained. The displacement of piezo-membranes increased from 5.1 to 17.5 nm V<sup>−1</sup> with a piezoelectric-membrane diameter in the range of 200–500 μm. Furthermore, the effect of PZT film-thickness on the mechanical properties has been investigated. By using the conductive-oxide SrRuO<sub>3</sub> (SRO) layers as the electrodes, the degradation of both ferroelectric and piezoelectric properties is prevented up to 10<sup>10</sup> switching cycles. |
| Формат | application.pdf |
| Издатель | Institute of Physics Publishing |
| Копирайт | 2011 Vietnam Academy of Science & Technology |
| Название | Epitaxial Pb(Zr,Ti)O<sub>3</sub> thin films for a MEMS application |
| Тип | paper |
| DOI | 10.1088/2043-6262/2/1/015005 |
| Electronic ISSN | 2043-6262 |
| Print ISSN | 2043-6254 |
| Журнал | Advances in Natural Sciences: Nanoscience and Nanotechnology |
| Том | 2 |
| Первая страница | 15005 |
| Последняя страница | 15009 |
| Аффилиация | Nguyen, Minh D; SolMateS B.V., Drienerlolaan 5, Building Hogekamp, 7522 NB Enschede, The Netherlands; Inorganic Materials Science, MESA Institute for Nanotechnology, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands; International Training Institute for Materials Science, Hanoi University of Technology, 1 Dai Co Viet Road, Hanoi, Vietnam |
| Аффилиация | Vu, Hung N; International Training Institute for Materials Science, Hanoi University of Technology, 1 Dai Co Viet Road, Hanoi, Vietnam |
| Аффилиация | Blank, Dave H A; Inorganic Materials Science, MESA Institute for Nanotechnology, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands |
| Аффилиация | Rijnders, Guus; Inorganic Materials Science, MESA Institute for Nanotechnology, University of Twente, PO Box 217, 7500 AE Enschede, The Netherlands |
| Выпуск | 1 |
