Technology of preparation of an M–I–M tunnel cathode for a 1:1 electron stepper
DR[Sbreve]TI[Cbreve]KA, M.; PAVELKA, P.; DR[Sbreve]TI[Cbreve]KA, M.; Institute of Scientific Instruments, Czechoslovak Academy of Sciences; PAVELKA, P.; Institute of Scientific Instruments, Czechoslovak Academy of Sciences
Журнал:
International Journal of Electronics
Дата:
1990
Аннотация:
The use of a metal–insulator–metal tunnel cathode in a 1 : 1 electron stepper in place or a photoemission cathode has substantial advantages. The main problem to be solved is the lifetime of the cathode. The alumina thin film in the Al/Al<sub>2</sub>O<sub>3</sub>/Au sandwich system has been studied by transmission electron microscopy. Replacement of some of the fabrication technological steps can influence the properties of the cathode.
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