Electrical properties of discontinuous copper films
BIEGAŃSKI, P.; DOBIERZEWSKA-MOZRZYMAS, E.; BIEGAŃSKI, P.; ‡Institute of Physics, Technical University of Wroclaw; DOBIERZEWSKA-MOZRZYMAS, E.; ‡Institute of Physics, Technical University of Wroclaw
Журнал:
International Journal of Electronics
Дата:
1991
Аннотация:
ABSTRACTCopper films of coverage coefficients ranging between 0 · 2 and 1 were evaporated onto glass substrates under vacuum conditions (p ≃ 10<sup>−8</sup>Torr). For these films, the temperature dependences of resistance were measured in vacuo in situ. Making use of the data obtained, TCR values as a function of coverage coefficient and the activation energy for films with different coverage coefficients were established. The film resistance was found to change, and TCR values approached zero for coverage coefficients between 0 · 63 and 0 · 75. This interval (Δq <sub>c</sub>) can be regarded as the percolation interval for discontinuous Cu films.
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