Applications of microelectronics in products and the use of advanced manufacturing technology in production are important factors driving innovation, productivity improvement and economic growth. Until the early 1980s there were few comprehensive national surveys of the diffusion of these technologies or of their impacts. This paper reviews surveys of firms using these technologies, discusses survey comparability and summarises key empirical results. The value of carefully constructed internationally comparable surveys for analysis and policy formulation is emphasised, and new directions for surveys are suggested.