Автор | Mehregany, Mehran |
Автор | Zorman, Christian A. |
Дата выпуска | 2001 |
dc.description | The rapid expansion of microelectromechanical systems (MEMS) into new application areas is due in large part to the development of surface-micromachining techniques that allow the fabrication of a wide variety of MEMS devices with structural components that can execute motion in at least one direction. |
Формат | application.pdf |
Издатель | Cambridge University Press |
Копирайт | Copyright © Materials Research Society 2001 |
Тема | Technical Feature |
Название | Surface Micromachining: A Brief Introduction |
Тип | research-article |
DOI | 10.1557/mrs2001.61 |
Electronic ISSN | 1938-1425 |
Print ISSN | 0883-7694 |
Журнал | MRS Bulletin |
Том | 26 |
Первая страница | 289 |
Последняя страница | 290 |
Выпуск | 4 |