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Автор Gogova, D.
Автор Gesheva, K.
Автор Kakanakova-Georgieva, A.
Автор Surtchev, M.
Дата выпуска 2000
dc.description Thin amorphous and polycrystalline tungsten oxide films have been prepared by Chemical Vapor Deposition (CVD) from metallorganic precursor − tungsten hexacarbonyl − at atmospheric pressure. The dependence of the composition and the structure of tungsten oxide films on the technological conditions has been investigated by XPS, XRD, DTA-TGA and Raman spectroscopy. As a result it has been established that: at high values of the flow-rates of the reaction gases amorphous films of very low density have been obtained; in the XPS spectra of the understoichiometric WO<sub>3−y </sub> (0 < y < 0.3) films besides W<sup>6+</sup>, also W<sup>5+</sup> and W<sup>4+</sup> states have been observed. First to observe in the Raman spectra of amorphous CVD-WO<sub>3</sub> films is the band at ~ 950 cm<sup>−1</sup>, characteristic for terminal W<sup>6+</sup> = O bonds in result of the presence of structural water. The existence of structural water in the amorphous material has been established by thermal analyze, also.
Формат application.pdf
Издатель EDP Sciences
Копирайт © EDP Sciences, 2000
Название Investigation of the structure of tungsten oxide films obtained by chemical vapor deposition
Тип research-article
DOI 10.1051/epjap:2000159
Electronic ISSN 1286-0050
Print ISSN 1286-0042
Журнал The European Physical Journal Applied Physics
Том 11
Первая страница 167
Последняя страница 174
Аффилиация Gogova D.; Central Laboratory for Solar Energy and New Energy Sources at the Bulgarian Academy of Sciences, 72 Tzarigradsko shose Blvd., 1784 Sofia, Bulgaria
Аффилиация Gesheva K.; Central Laboratory for Solar Energy and New Energy Sources at the Bulgarian Academy of Sciences, 72 Tzarigradsko shose Blvd., 1784 Sofia, Bulgaria
Аффилиация Kakanakova-Georgieva A.; Linköping University, Department of Physics and Measurement Technology, Material Science Division, S-581 83 Linköping, Sweden
Аффилиация Surtchev M.; Sofia University, Department of Physics, 5 James Boucher Blvd., Sofia, Bulgaria
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