| Автор | Chen, Y. |
| Автор | Lebib, A. |
| Автор | Li, S. |
| Автор | Pépin, A. |
| Автор | Peyrade, D. |
| Автор | Natali, M. |
| Автор | Cambril, E. |
| Дата выпуска | 2000 |
| dc.description | Replication of patterns at a nanometer scale is a challenge for both advanced optical lithography and post-optical techniques. Considerable industrial effort has been devoted to the so-called leading-edge optical methods and the next generation lithography techniques. In parallel, a number of low-cost techniques such as nanoimprint and micro-contact printing are being investigated. In these methods, pattern replication is performed in non-conventional ways so that diffraction and scattering problems are no longer relevant. However, several other critical issues have to be studied. This paper describes two tri-layer pattern-transfer techniques, which can be used to improve the process latitude and the process compatibility. Pattern replication and lift-off transfer with feature sizes down to 30 nm and 150 nm have been achieved respectively by nanoimprint and micro-contact printing. As application examples, high-density magnetic dot structures are obtained and studied by measuring magneto-optical Kerr hysteresis loops. |
| Формат | application.pdf |
| Издатель | EDP Sciences |
| Копирайт | © EDP Sciences, 2000 |
| Название | Nanoimprint and micro-contact printing tri-layer processes* |
| Тип | research-article |
| DOI | 10.1051/epjap:2000183 |
| Electronic ISSN | 1286-0050 |
| Print ISSN | 1286-0042 |
| Журнал | The European Physical Journal Applied Physics |
| Том | 12 |
| Первая страница | 223 |
| Последняя страница | 229 |
| Аффилиация | Chen Y.; Laboratoire de Microstructures et de Microélectronique, CNRS, 196 avenue Henri Ravera, 92225 Bagneux, France |
| Аффилиация | Lebib A.; Laboratoire de Microstructures et de Microélectronique, CNRS, 196 avenue Henri Ravera, 92225 Bagneux, France |
| Аффилиация | Li S.; Laboratoire de Microstructures et de Microélectronique, CNRS, 196 avenue Henri Ravera, 92225 Bagneux, France |
| Аффилиация | Pépin A.; Laboratoire de Microstructures et de Microélectronique, CNRS, 196 avenue Henri Ravera, 92225 Bagneux, France |
| Аффилиация | Peyrade D.; Laboratoire de Microstructures et de Microélectronique, CNRS, 196 avenue Henri Ravera, 92225 Bagneux, France |
| Аффилиация | Natali M.; Laboratoire de Microstructures et de Microélectronique, CNRS, 196 avenue Henri Ravera, 92225 Bagneux, France |
| Аффилиация | Cambril E.; Laboratoire de Microstructures et de Microélectronique, CNRS, 196 avenue Henri Ravera, 92225 Bagneux, France |
| Выпуск | 3 |
