Автор |
Rousset, V. |
Автор |
Joachim, C. |
Автор |
Ondarçuhu, T. |
Автор |
Rousset, B. |
Дата выпуска |
1998 |
dc.description |
Planar metal/semiconductor/metal (PMSM) junctions buried in a SiO<sub>2</sub> layer are fabricated using electron beam lithography on a silicon sample. A technique of jump of pixels is used to obtain different sizes of junctions, the smallest having an inter-electrode distance of 5 nm. The current-voltage characteristics and the variation of the junction conductance with the temperature down to 8 K have been studied. At all sizes and for both polarities, the I−V curves correspond to the reverse characteristic of a metal/semiconductor contact. At low bias voltage, the influence of a thin insulator interfacial layer between the metal and the semiconductor has been pointed out. For these junctions, a non-linear low voltage I−V characteristics is observed before the large voltage thermionic emission regime. For the smallest junctions obtained without interfacial oxide layer, a linear I−V characteristic is recovered at low voltage. Their conductance can be lowered by decreasing the temperature. |
Формат |
application.pdf |
Издатель |
EDP Sciences |
Копирайт |
© EDP Sciences, 1998 |
Название |
I−V characteristics of co-planar metal-semiconductor-metal nanojunctions |
Тип |
research-article |
DOI |
10.1051/epjap:1998199 |
Electronic ISSN |
1286-0050 |
Print ISSN |
1286-0042 |
Журнал |
The European Physical Journal Applied Physics |
Том |
3 |
Первая страница |
21 |
Последняя страница |
28 |
Аффилиация |
Rousset V.; CEMES-LOE/CNRS, 29 rue J. Marvig, BP 4347, 31055 Toulouse Cedex, France |
Аффилиация |
Joachim C.; CEMES-LOE/CNRS, 29 rue J. Marvig, BP 4347, 31055 Toulouse Cedex, France |
Аффилиация |
Ondarçuhu T.; CEMES-LOE/CNRS, 29 rue J. Marvig, BP 4347, 31055 Toulouse Cedex, France |
Аффилиация |
Rousset B.; LAAS/CNRS, 7 avenue du Colonel Roche, 31077 Toulouse Cedex, France |
Выпуск |
1 |