| Автор | Flueraru, C. |
| Автор | Cobianu, C. |
| Автор | Dascalu, D. |
| Автор | Flueraru, M. |
| Дата выпуска | 1998 |
| dc.description | Microscale phenomena between the surface of chemically vapour deposited silicon films and a silicon nitride tip was investigated using Scanning Force Microscopy. An analysis of friction forces for different scan directions is presented. For different applied forces, the friction forces were measured and consequently the friction coefficient was calculated. We found that the average friction force linearly increases with the applied force and is reversible when unloading. Connection between the surface roughness and the friction coefficient was experimentally demonstrated. |
| Формат | application.pdf |
| Издатель | EDP Sciences |
| Копирайт | © EDP Sciences, 1998 |
| Название | Microscale friction investigation of polysilicon surface using scanning force microscopy |
| Тип | research-article |
| DOI | 10.1051/epjap:1998200 |
| Electronic ISSN | 1286-0050 |
| Print ISSN | 1286-0042 |
| Журнал | The European Physical Journal Applied Physics |
| Том | 3 |
| Первая страница | 29 |
| Последняя страница | 33 |
| Аффилиация | Flueraru C.; Institute of Microtechnology, PO Box 38-160, Bucharest 72225, Romania |
| Аффилиация | Cobianu C.; Institute of Microtechnology, PO Box 38-160, Bucharest 72225, Romania |
| Аффилиация | Dascalu D.; Institute of Microtechnology, PO Box 38-160, Bucharest 72225, Romania |
| Аффилиация | Flueraru M.; Department for Organic Chemistry, University of Bucharest, Bld. Carol 13, Bucharest, Romania |
| Выпуск | 1 |
