| Автор | Tiwari, P. |
| Автор | Zheleva, T. |
| Автор | Morimoto, A. |
| Автор | Shukla, V.N. |
| Автор | Narayan, J. |
| dc.description | ABSTRACTWe have fabricated high-quality <001> textured Pb(Zr<sub>0.54</sub>Ti<sub>0.46</sub>)O<sub>3</sub> (PZT) thin films on (001)Si with interposing <001> textured YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7−δ</sub> (YBCO) and yttria-stabilized zirconia (YSZ) buffer layers using pulsed laser deposition (KrF excimer laser, λ=248 nm, τ=20 nanoseconds). The YBCO layer provides a seed for PZT growth and can also act as an electrode for the PZT films, whereas YSZ provides a diffusion barrier as well as a seed for the growth of YBCO films on (001)Si. These heterostructures were characterized using X-ray diffraction, high-resolution transmission electron microscopy and Rutherford backscattering techniques. The YSZ films were deposited in oxygen ambient (∼9X10<sup>−4</sup> torr) at 775°C on (001)Si substrate having <001>YSZ// <001>Si texture. The YBCO thin films were deposited in-situ in oxygen ambient (200 mtorr) at 650°C. Temperature and oxygen ambient for the PZT deposition were optimized to be 530°C and 0.4–0.6 torr, respectively. The laser fluence to deposit this multistructure was 2.5–5.0 J/cm<sup>2</sup>. The <001> textured perovskite PZT films showed a dielectric constant of 800–1000, a saturation polarization of 37.81 μC/cm<sup>2</sup>, remnant polarization of 24.38 μC/cm<sup>2</sup> and a coersive field of 125 kV/cm. The effects of processing parameters on microstructure and ferroelectric properties of PZT films and device implications of these structures are discussed. |
| Формат | application.pdf |
| Издатель | Cambridge University Press |
| Копирайт | Copyright © Materials Research Society 1993 |
| Название | Preparation of Pb(Zr<sub>0.54</sub>Ti<sub>0.46</sub>)O<sub>3</sub> Thin Films on (100)Si Using Textured YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7−δ</sub> and Yttria-Stabilized Zirconia Buffer Layers by Laser Physical Vapor Deposition Technique |
| Тип | research-article |
| DOI | 10.1557/PROC-285-397 |
| Electronic ISSN | 1946-4274 |
| Print ISSN | 0272-9172 |
| Журнал | MRS Proceedings |
| Том | 285 |
| Аффилиация | Tiwari P.; Department of Materials Science and Engineering North Carolina State University |
| Аффилиация | Zheleva T.; Department of Materials Science and Engineering North Carolina State University |
| Аффилиация | Morimoto A.; Department of Materials Science and Engineering North Carolina State University |
| Аффилиация | Shukla V.N.; Department of Materials Science and Engineering North Carolina State University |
| Аффилиация | Narayan J.; Department of Materials Science and Engineering North Carolina State University |
