A comparison of three versions of sigmund's model of sputtering using experimental results
Strydom, H. J.; Gries, W. H.; Strydom, H. J.; National Institute for Materials Research, CSIR; Gries, W. H.; National Institute for Materials Research, CSIR
Журнал:
Radiation Effects
Дата:
1984
Аннотация:
AbstractTwo modifications of Sigmund's sputtering formula, viz. by Bohdansky and by Yamamura et al. are compared with an α-adaptation of Sigmund's original formula to 620 experimental sputtering yields taken from literature. Using the α-values for the comparison, it was found that the considerable scatter of these values (averaged for given M<sub>1</sub>, Z<sub>1</sub>, M<sub>2</sub>, Z<sub>2</sub>) is not reduced by either of the two modifications, except for values in the range M<sub>2</sub>/M<sub>1</sub> > 100. In each of the three versions the scatter is systematic, however, in as far as certain target elements yield average values of α which are consistently high, low or intermediate over a wide range of M<sub>2</sub>/M<sub>1</sub> ratios.
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