| Автор | Strydom, H. J. |
| Автор | Gries, W. H. |
| Дата выпуска | 1984 |
| dc.description | AbstractTwo modifications of Sigmund's sputtering formula, viz. by Bohdansky and by Yamamura et al. are compared with an α-adaptation of Sigmund's original formula to 620 experimental sputtering yields taken from literature. Using the α-values for the comparison, it was found that the considerable scatter of these values (averaged for given M<sub>1</sub>, Z<sub>1</sub>, M<sub>2</sub>, Z<sub>2</sub>) is not reduced by either of the two modifications, except for values in the range M<sub>2</sub>/M<sub>1</sub> > 100. In each of the three versions the scatter is systematic, however, in as far as certain target elements yield average values of α which are consistently high, low or intermediate over a wide range of M<sub>2</sub>/M<sub>1</sub> ratios. |
| Формат | application.pdf |
| Издатель | Taylor & Francis Group |
| Копирайт | Copyright Taylor and Francis Group, LLC |
| Название | A comparison of three versions of sigmund's model of sputtering using experimental results |
| Тип | research-article |
| DOI | 10.1080/01422448408209709 |
| Print ISSN | 0033-7579 |
| Журнал | Radiation Effects |
| Том | 86 |
| Первая страница | 145 |
| Последняя страница | 151 |
| Аффилиация | Strydom, H. J.; National Institute for Materials Research, CSIR |
| Аффилиация | Gries, W. H.; National Institute for Materials Research, CSIR |
| Выпуск | 4 |
| Библиографическая ссылка | Sigmund, P. 1969. Phys. Rev., 184: 383 |
| Библиографическая ссылка | Bohdansky, J. 1983. Proc. Symp. Surface Science. 1983, Obertraun, Austria. Edited by: Braun, P. pp.127Vienna, , Austria: Institut f. Allgemeine Physik, Technische Universität Wien. Karlsplatz 13, A-1040 |
| Библиографическая ссылка | Yamamura, Y., Matsunami, N. and Itoh, N. 1982. Rad. Eff. Lett., 68: 83 |
| Библиографическая ссылка | Gries, W. H. and Strydom, H. J. 1984. A Table of Normalized Sputtering Yields for Monoelemental Polycrystalline Targets Report SMAT 3, NIMR/CSIR, P.O. Box 395, Pretoria 0001 South Africa. |
| Библиографическая ссылка | Lindhard, J., Scharff, M. and SchiøpHtt, H. E. 1963. Dan. Vid. Selsk. Mat. Fys. Medd., 33(14) |
| Библиографическая ссылка | Bohdanksy, J. 1980. J. Nucl. Materials, 93/94: 44 |
| Библиографическая ссылка | Gibbons, J. F., Johnson, W. S. and Mylroie, S. 1975. Projected Range Statistics , 2nd ed, Stroudsburg, Penn., , U.S.A.: Dowden, Hutchinson & Ross Inc.. |
| Библиографическая ссылка | Bohdansky, J. 1983. Int. Conf. Atomic Collisions in Solids. 1983. Bad Iburg, , Germany |
