Microelectro-mechanical Systems: Technology and Applications
Bishop, David; Heuer, Arthur; Williams, David
Журнал:
MRS Bulletin
Дата:
2001
Аннотация:
Microelectromechanical systems, or MEMS, constitute a group of microdevices that are just beginning to affect many areas of science and technology. In diverse fields including the automotive industry, aeronautics, cellular communications, chemistry, acoustics, and display technologies and other photonic systems, these highly functional devices are making a big name for themselves, despite their diminutive size.
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