| Автор | Bishop, David |
| Автор | Heuer, Arthur |
| Автор | Williams, David |
| Дата выпуска | 2001 |
| dc.description | Microelectromechanical systems, or MEMS, constitute a group of microdevices that are just beginning to affect many areas of science and technology. In diverse fields including the automotive industry, aeronautics, cellular communications, chemistry, acoustics, and display technologies and other photonic systems, these highly functional devices are making a big name for themselves, despite their diminutive size. |
| Формат | application.pdf |
| Издатель | Cambridge University Press |
| Копирайт | Copyright © Materials Research Society 2001 |
| Тема | Technical Feature |
| Название | Microelectro-mechanical Systems: Technology and Applications |
| Тип | research-article |
| DOI | 10.1557/mrs2001.60 |
| Electronic ISSN | 1938-1425 |
| Print ISSN | 0883-7694 |
| Журнал | MRS Bulletin |
| Том | 26 |
| Первая страница | 282 |
| Последняя страница | 288 |
| Выпуск | 4 |
