0.5 MeV Submicron Ion Probe System for RBS/PIXE.
Inoue, K.; Takai, M.; IshibashI, K.; Kawata, Y.; Suzuki, N.; Namba, S.; Inoue K.; Electronics Technology Center, Kobe Steel Ltd., Nishi-ku, Kobe 673-02, Japan; Takai M.; Osaka University; IshibashI K.; Electronics Technology Center, Kobe Steel Ltd., Nishi-ku, Kobe 673-02, Japan; Kawata Y.; Electronics Technology Center, Kobe Steel Ltd., Nishi-ku, Kobe 673-02, Japan; Suzuki N.; Electronics Technology Center, Kobe Steel Ltd., Nishi-ku, Kobe 673-02, Japan; Namba S.; Osaka University
Журнал:
MRS Proceedings
Дата:
1988
Аннотация:
ABSTRACTA nuclear microprobe-forming system for the microscopic RBS/PIXE measurement of micro devices has been developed and installed at the Research Center for Extreme Materials, Osaka University. The use of precision quadrupole magnets and an objective collimator ensures a final spot size of less than 1μm.
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