| Автор | Inoue, K. |
| Автор | Takai, M. |
| Автор | IshibashI, K. |
| Автор | Kawata, Y. |
| Автор | Suzuki, N. |
| Автор | Namba, S. |
| Дата выпуска | 1988 |
| dc.description | ABSTRACTA nuclear microprobe-forming system for the microscopic RBS/PIXE measurement of micro devices has been developed and installed at the Research Center for Extreme Materials, Osaka University. The use of precision quadrupole magnets and an objective collimator ensures a final spot size of less than 1μm. |
| Формат | application.pdf |
| Издатель | Cambridge University Press |
| Копирайт | Copyright © Materials Research Society 1989 |
| Название | 0.5 MeV Submicron Ion Probe System for RBS/PIXE. |
| Тип | research-article |
| DOI | 10.1557/PROC-128-381 |
| Electronic ISSN | 1946-4274 |
| Print ISSN | 0272-9172 |
| Журнал | MRS Proceedings |
| Том | 128 |
| Аффилиация | Inoue K.; Electronics Technology Center, Kobe Steel Ltd., Nishi-ku, Kobe 673-02, Japan |
| Аффилиация | Takai M.; Osaka University |
| Аффилиация | IshibashI K.; Electronics Technology Center, Kobe Steel Ltd., Nishi-ku, Kobe 673-02, Japan |
| Аффилиация | Kawata Y.; Electronics Technology Center, Kobe Steel Ltd., Nishi-ku, Kobe 673-02, Japan |
| Аффилиация | Suzuki N.; Electronics Technology Center, Kobe Steel Ltd., Nishi-ku, Kobe 673-02, Japan |
| Аффилиация | Namba S.; Osaka University |
