Monte-Carlo investigation of in-plane electron transport in tensile strained Si and Si<sub>1−y </sub>C<sub> y </sub> (y ≤ 0.03)
Dollfus, Ph.; Galdin, S.; Hesto, P.; Dollfus Ph.; Institut d'Électronique Fondamentale (URA 22 du CNRS), Université Paris-Sud, Bâtiment 220, 91405 Orsay Cedex, France; Galdin S.; Institut d'Électronique Fondamentale (URA 22 du CNRS), Université Paris-Sud, Bâtiment 220, 91405 Orsay Cedex, France; Hesto P.; Institut d'Électronique Fondamentale (URA 22 du CNRS), Université Paris-Sud, Bâtiment 220, 91405 Orsay Cedex, France
Журнал:
The European Physical Journal Applied Physics
Дата:
1999
Аннотация:
Electron transport properties in tensile strained Si-based materials are theoretically analyzed using Monte-Carlo calculation. We focus our interest on in-plane transport in Si and Si<sub>1−y </sub>C<sub> y </sub> (y ≤ 0.03), grown respectively on 〈001〉 Si<sub>1−x </sub>Ge<sub> x </sub> pseudo-substrate and Si substrate, with a view to Field-Effect-Transistor application. In comparison with unstrained Si, the tensile strain effect is shown to be very attractive in Si: drift mobilities greater than 3000 cm<sup>2</sup>/Vs are obtained at 300 K for a Ge fraction mole of 0.2 in the pseudo-substrate. In the Si<sub>1−y </sub>C<sub> y </sub>/Si system, that does not need any pseudo-substrate, the beneficial strain effect on transport is counterbalanced by the alloy scattering whose influence on mobility is studied. If the alloy potential is greater than about 1 eV, the advantage of strain-induced reduction of effective mass is lost in terms of stationary transport performance at 300 K.
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